Operational principle:
Magnetron sputtering is a physical vapor deposition technology that uses a magnetic field to confine and enhance glow discharge plasma, thereby efficiently sputtering target materials and depositing thin films on substrates.
Applications:
It is widely used in household appliances, clocks, golf heads, arts and crafts, toys, car light reflectors, mobile phone button shells, instruments and meters, plastics, glass, ceramics, tiles and other surface decorative coatings and functional coatings for tools and molds.
It has advantages in the fields of plating ultra-black film, pure gold decorative film, etc.















Features:
The film thickness is controllable and repeatable.
It can reliably deposit a film of predetermined thickness, and sputtering coating can obtain a uniform film thickness on a large surface.
The film has strong adhesion to the substrate.
Some high-energy sputtered atoms produce different degrees of injection, forming a pseudo-diffusion layer on the substrate where the sputtered atoms and substrate atoms fuse with each other.
Preparation of thin films of special materials.
Mixed films and compound films can be prepared by sputtering different materials at the same time. TiN imitation gold films can also be sputtered.
The film has high purity and the sputtered film will not be mixed with the components of the crucible heater material.
Equipped with low-temperature ion auxiliary source, it can form films by cold plating at room temperature without heating, saving energy and electricity, and improving production capacity.
Specification:
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Magnetron sputtering equipment |
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Model |
CJ-600 |
CJ-800 |
CJ-1000 |
CJ-1200 |
CJ-1400 |
CJ-1500 |
CJ-1600 |
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Chamber size |
Φ600×800MM |
Φ800×1000MM |
Φ1000×1200MM |
Φ1200×1400MM |
Φ1400×1600MM |
Φ1500×1500MM |
Φ1600×1800MM |
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Vacuum unit |
KT400 Diffusion pump unit |
KT500 Diffusion pump unit |
KT800 Diffusion pump unit |
KT630 Diffusion pump unit |
Double KT630 Diffusion pump unit |
Double KT630 Diffusion pump unit |
Double KT630 Diffusion pump unit |
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Coating system |
DC or medium frequency power supply, coating auxiliary ion special power supply |
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Inflation system |
Mass flow meter |
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Control method |
Manual or fully automatic |
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Ultimate vacuum |
5X10-3Pa |
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Remark |
The above equipment parameters are for reference only, and are designed and customized according to the actual process requirements of customers. |
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