One,Before restarting a diffusion pump, perform a leak check.
If the pump has been used continuously for more than six months and the pumping speed has significantly slowed, or if it has been improperly operated or has been filled with air, remove the water connection pipe, remove the electric stove, and unscrew the first-stage nozzle.
First, clean the pump chamber and pump bladder with gasoline, then rinse it again with detergent and water, and then rinse it with clean water. After the water evaporates, install the pump bladder, add new diffusion pump oil, and reinstall the pump body. Connect the water pipes and install the electric stove before restarting the pump.
To do this, start the maintenance pump, close the door, and wait for several minutes to observe whether the partial vacuum in the diffusion pump reaches 6 x 10 Pa. If not, perform a leak check. Check the joints for leaks or damage to the sealing rings. Only heat the pump after eliminating leaks; otherwise, the diffusion pump oil will burn and the pump will not function properly.
Two,After a roughing pump (sliding valve pump, rotary vane pump) has been operating continuously for one month (half the time during the rainy season), it's time to replace the oil.
To do this, loosen the drain bolt, drain the old oil, and then start the pump for a few seconds to allow the old oil to completely drain out. Replace the drain bolt and add new oil to the specified level (observe through the oil sight glass). If the pump has been in continuous use for more than six months, remove the oil cap and wipe the oil tank clean with a cloth.
Third,The vacuum coating machine's workroom should be cleaned every 200 or more coating cycles.
To do this, repeatedly scrub the inner walls of the vacuum chamber with a saturated solution of caustic soda (NaOH). (Note: Do not allow direct contact with human skin to prevent burns.) The goal is to cause the coated aluminum (Al) to react with the NaOH, causing the film to fall off and releasing hydrogen. Then, rinse the vacuum chamber with clean water and clean dirt inside the fine pump valve with a cloth dampened with gasoline.
These are some common maintenance methods for vacuum coating machines. Daily maintenance is essential, and mastering these maintenance techniques will help improve your company's productivity and reduce costs.
