Troubleshooting Common Problems in Magnetron Sputtered Films

May 09, 2026

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magnetron sputtering coating equipment

 

The film layer is dull and blackened.

(1) Vacuum level is below 0.67 Pa. The vacuum level should be increased to 0.13-0.4 Pa.

(2) Argon purity is below 99.9%. Argon with a purity of 99.99% should be used.

(3) Gas filling system leakage. The gas filling system should be checked and the leakage eliminated.

(4) Primer not fully cured. The curing time of the primer should be appropriately extended.

(5) Excessive venting from the plated part. Drying and sealing treatment should be performed. The film layer surface has a dull gloss.

(6) Poorly cured or deteriorated primer. The curing time of the primer should be appropriately extended or the primer should be replaced.

(7) Sputtering time is too long. It should be appropriately shortened.

(8) Sputtering film formation speed is too fast. The sputtering current or voltage should be appropriately reduced.

 

Uneven film color

(1) Uneven primer application. The primer application method should be improved.

(2) The film layer is too thin. The sputtering speed should be appropriately increased or the sputtering time extended.

(3) Inappropriate fixture design. The fixture design should be improved.

(4) The geometry of the plated part is too complex. The rotation speed of the plated part should be appropriately increased.
 

Wrinkled and cracked film

(1) The primer is applied too thickly. The thickness should be controlled within the range of 7-10 tan.

(2) The viscosity of the paint is too high. It should be appropriately reduced.

(3) The evaporation rate is too fast. It should be appropriately slowed down.

(4) The film is too thick. The sputtering time should be appropriately shortened.

(5) The temperature of the plated part is too high. The heating time of the plated part should be appropriately shortened.
 

Watermarks, fingerprints, and dust particles are present on the coating surface.

(1) The plated parts were not sufficiently dried after cleaning. Pre-plating treatment should be strengthened.

(2) Water droplets or saliva are splashed on the plated parts. Civilized production should be strengthened; operators should wear masks.

(3) Fingerprints are left on the plated parts after hand contact with the primer. Hand contact with the plated parts should be strictly prohibited.

(4) There are particulate matter in the paint. The paint should be filtered or replaced.

(5) Electrostatic dust removal is ineffective, or there is particulate dust in the spraying and curing environment. The dust collector should be replaced, and the working environment should be kept clean.

 

Poor film adhesion

(1) Incomplete degreasing of the workpiece. Pre-plating treatment should be strengthened.

(2) Unclean vacuum chamber. The vacuum chamber should be cleaned. It is important to note that during target loading and unloading, hands or unclean objects must not come into contact with the magnetron source to ensure its high cleanliness, which is one of the key measures to improve film adhesion.

(3) Unclean fixture. The fixture should be cleaned.

(4) Inappropriate primer selection. The primer should be replaced.

(5) Improper sputtering process conditions. Sputtering process conditions should be improved.

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