Working Environment Requirements Of Vacuum Coating Machine

Vacuum coating machine mainly refers to a coating that needs to be carried out under high vacuum, including vacuum ion evaporation, magnetron sputtering, molecular beam epitaxy, PLD laser sputtering deposition and many other types. Its main idea is divided into evaporation and sputtering.
Working environment requirements of vacuum coating machine:
Vacuum coating equipment should work under vacuum conditions, so the equipment should meet the requirements of vacuum for the environment. The requirements of vacuum for the environment generally include the requirements of vacuum equipment for laboratory (or workshop) temperature, air and other particulate matter in the surrounding environment, and the requirements for parts or surfaces in vacuum or vacuum.
These two aspects are closely related. The surrounding environment directly affects the normal use of vacuum equipment; whether the vacuum chamber or the parts installed in the vacuum equipment are clean directly affects the performance of the equipment. If there is a lot of water vapor and dust in the air, it is difficult to achieve the expected vacuum degree by pumping with an oil-sealed mechanical pump without cleaning the vacuum chamber. It is well known that oil-sealed mechanical pumps should not pump out gases containing particulate dust that is corrosive to metals and reactive to vacuum oil. Water vapor is a condensable gas. When a large amount of condensable gas is pumped out, the pollution of pump oil will be more serious. Therefore, the ultimate vacuum of the pump will be reduced and the pumping performance of the pump will be impaired.
Dust in industrial environments is characterized by powdery bodies, untitled eyes and dust. Powder is a substance in a state of aggregation or dispersion of powder or solid particles. The so-called powder refers to a collection of tiny solid particles, and particles refer to tiny substances that can be counted one by one. Smoke is a material system in which small particles of solid or liquid exist in a floating state in the gas. Substances in a granular state, whether solid or liquid, are collectively referred to as dust particles. The air cleanliness standard is determined by the size of the dust particle size, thereby customizing the clean room grade. It is not only applicable to industrial sectors with clean requirements, but also to vacuum requirements for clean environments.