Ceramic PVD Coating Machine

Details

Ceramic substrate PVD coating machine is a key equipment for high-precision thin film deposition of ceramic materials (such as aluminum oxide, aluminum nitride, silicon nitride, zirconium oxide, etc.). It uses physical vapor deposition technology under vacuum environment to form various functional films on the surface of ceramic substrates.
Condition: New
Warranty: 1 Year
After-sales Service Provided: Field installation, commissioning and training, Engineers available to service machinery overseas
Certification: CE, ISO9001
Substrate: ceramic
Vacuum chamber material: SUS-304 superior stainless steel
Vacuum chamber size: Custom-made
Vacuum chamber structure: Vertical/Horizontal/Batch/In-line

Category

PVD Coating Machine

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It uses physical vapor deposition technology under vacuum environment to form various functional films on the surface of ceramic substrates.

Ceramic substrate PVD coating machines have become an indispensable core equipment for realizing surface functionalization of ceramic substrates (conductive, thermal, solderable, bonding, protective, optical, etc.) in high-end electronics, optoelectronics, semiconductors, power electronics and other fields due to their ultra-high vacuum environment, precise process control, multiple coating technology options and excellent thin film properties (high purity, density, strong adhesion, high precision).

Applications:

Electronic packaging

Metallization on LED chip holders, power module substrates, microwave RF device housings/substrates, and semiconductor ceramic packages.

Optoelectronics

Metallization of ceramic substrates/heat sinks for LEDs, lasers, and photodetectors.

Semiconductors

Interconnections on MEMS device structural layers, sensor electrodes, and ceramic insulation layers.

Power electronics

Surface metallization (Cu, Al) and barrier/protective layers of ceramic substrates (DCB, AMB) for power devices such as IGBT and MOSFET.

Thin film circuits

Thin film resistors, capacitors, inductors, and transmission lines on ceramic substrates for hybrid integrated circuits and microwave millimeter wave circuits.

Sensors

Functional electrodes and leads for various ceramic substrate sensors (pressure, temperature, gas).

Aerospace and defense

High reliability, extreme environment resistant electronic components and ceramic parts.