Magnetron Sputtering Coating Vacuum Deposition Equipment

The core principle of vacuum deposition equipment is to vaporize or ionize the material source in a vacuum environment, and then allow the generated atoms, molecules or ions to deposit on the surface of the target substrate to form one or more thin films.

Inside a high-vacuum sealed chamber, a magnetic field confines electrons to ionize argon gas,the resulting argon ions bombard a metal or oxide target,causing target atoms to be sputtered off and deposited onto the surface of a workpiece mounted on the chamber's rotating rack,thereby forming a dense, nanoscale thin film.The system supports DC,MF, and RF sputtering power supplies and accommodates both conductive and insulating targets, a multi-target configuration enables co-sputtering for the fabrication of single-layer and multilayer composite films.

Equipment Features

The coating quality is stable and uniform, with strong adhesion 
A planetary turntable drives the workpieces to rotate throughout the chamber, ensuring consistent film thickness across the entire batch and preventing peeling or flaking. The coatings are of high purity, and the system can produce metal, alloy, and dielectric oxide films.

Supports low-temperature coating and offers broad substrate compatibility
Equipped with a low-temperature ion-assist source as standard, enabling room-temperature coating with minimal workpiece temperature rise, thereby preventing deformation caused by high heat.

Flexible process capabilities, multi-target co-sputtering
The chamber can be configured with multiple magnetron targets, allowing for the simultaneous loading of different target materials.

Fully automatic closed-loop control via PLC ensures ease of operation

Vacuum evacuation, argon gas flow, sputtering power, turntable rotation speed, and ion source parameters are all automatically controlled. The system features a touchscreen HMI and allows for the presetting of multiple coating recipes.

Vacuum chambers, supports non-standard customization 

Simple maintenance, stable vacuum system

Bathroom faucets, showers, watch cases/straps, eyeglass frames, tableware, mobile phone cases, notebook cases, prepare various colored decorative films, anti-fingerprint films, and corrosion-resistant protective films.

High coating density and extremely low porosity

Atoms deposited via magnetron sputtering possess high energy, enabling strong surface mobility and tight packing

Virtually pinhole-free with minimal porosity

Corrosion and oxidation resistance significantly superior to vacuum-evaporated coatings

Excellent salt spray test performance; suitable for anti-corrosion and decorative applications on bathroom fixtures, hardware, and outdoor components