physical vapor deposition machine for optical is to place the film material in a water-cooled copper crucible and directly use electron beam heating to make the atoms or molecules in the film material vaporize and escape from the surface, then enter the substrate surface and condense into a film.
Electron beam evaporation has higher thermal efficiency, higher beam current density, faster evaporation speed, and higher purity of the film than general resistance heating evaporation.
Applications:
Optical coating machine can coat a variety of film systems with a large number of layers, such as short-wave pass, long-wave pass, anti-reflection film, reflective film, filter film, spectroscopic film, bandpass film, dielectric film, high-reflective film, color reflective film, etc.
It can achieve film coating of 0-50 layers of film, and can also meet the coating requirements of products such as automotive reflective glass, eyeglasses, optical lenses, cold light cups, etc.
It can coat a variety of film systems with different evaporation sources, electron guns, ion sources and film thickness meters, and can evaporate metals, oxides, compounds and other high-melting-point film materials.
Features:
Physical vapor deposition machine for optical is equipped with a quartz crystal film thickness meter, and the PLC and touch screen system are combined to realize automatic control of the entire working process, with excellent work efficiency and product quality repeatability.
Suitable for use by manufacturers in the optical field and large-scale industrial production requirements.
Specification:
| Optical coating machine | |||||||
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Model |
SF-800 |
SF-1200 |
SF-1400 |
SF-1600 |
SFW-1000 |
SFW-1200 |
SFW-1600 |
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Chamber size |
Φ800×1000MM |
Φ1200×1400MM |
Φ1400×1600MM |
Φ1600×1800MM |
Φ1000×1100MM |
Φ1200×1400MM |
Φ1600×1800MM |
|
Vacuum unit |
KT500 Diffusion pump unit |
KT630 Diffusion pump unit |
Double KT630 Diffusion pump unit |
Double KT630 Diffusion pump unit |
KT500 Diffusion pump unit |
KT630 Diffusion pump unit |
Double KT630 Diffusion pump unit |
|
Coating system |
Electron gun evaporation source, coating auxiliary ion dedicated power supply or Hall ion source |
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Inflation system |
Pressure Controller |
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Control method |
Manual or fully automatic |
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Film thickness monitoring system |
Quartz crystal film thickness monitoring system |
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Pumping rate |
5×10-3Pa﹤15min |
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Ultimate vacuum |
3.0X10-4Pa |
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Remark |
The above equipment parameters are for reference only, and are designed and customized according to the actual process requirements of customers. |
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