Operation of the electric control cabinet
1. Turn on the water pump and gas source.
2. Turn on the main power supply.
3. Turn on the power supply of the maintenance pump and vacuum gauge, and the vacuum gauge position V1 position. Wait for its value to be less than 10 before entering the next step. It takes about 5 minutes.
4. Turn on the mechanical pump, pre-pump, turn on the turbomolecular pump power supply, and start it. Switch the vacuum gauge switch to V2 position and pump until it is less than 2. It takes about 20 minutes.
5. After observing that the turbomolecular pump reading reaches 250, turn off the pre-pump, turn on the front pump and high vacuum valve to continue vacuuming. After the vacuum reaches a certain level, the high vacuum gauge on the right can be turned on to observe the vacuum degree. The electron gun power supply can only be turned on after the vacuum reaches 2×10-3.
DEF-6B
1. Main power supply.
2. Turn on the power of electron gun control Ⅰ and electron gun control Ⅱ at the same time: press the power and delay switch of electron gun control Ⅰ, the delay, power and protection lights will light up, and the delay and protection lights will go out after three minutes. If the rear door is not closed or the water flow relay is faulty, the protection light will be always on.
3. Turn on the high voltage, the high voltage will reach more than 10KV, adjust the beam current to about 200mA, the curtain grid is 20V/100mA, the filament current is 1.2A, and the deflection current swings between 1 and 1.7.
Shutdown sequence
1. Turn off the high vacuum gauge and the molecular pump.
2. When the molecular pump displays 50, turn off the high valve, the front stage, and the mechanical pump in turn. This period takes about 40 minutes.
3. When it is below 50, turn off the maintenance pump.
