Vacuum coating machine diffusion pump repair and maintenance

The diffusion pump is the main component of the vacuum coating machine. In order for the machine to operate in good condition, it is very important to maintain and maintain the diffusion pump of the vacuum coating machine.
1. The cooling water must be kept unobstructed during the operation of the diffusion pump. After stopping the heating, the cooling water can be turned off only after the pump working fluid has been completely cooled.
2. When the diffusion pump stops working, the pump should be kept in a vacuum state to prevent the pump oil from deteriorating.
3. The pumped gas should be dry, non-corrosive, and dust-free.
4. If the diffusion pump is not used temporarily, it should be kept in a vacuum state during storage to prevent pump oil contamination and corrosion of various parts, and blow away the remaining water in the cooling water jacket. The room temperature of the site should be kept between 10-40 degrees Celsius.
5. The performance of the diffusion pump will gradually deteriorate after long-term operation, and it should be checked regularly. For example: whether the pump oil is reduced or oxidized, add oil or replace it according to the corresponding requirements; the parts and pump chamber are first cleaned with aviation gasoline, then scrubbed with acetone, and placed at 80-100 degrees Celsius to dry or blown dry with a hair dryer. After processing, assemble in order, keep the pump core and the pump bottom vertical and concentric with the pump chamber, and adjust the gaps between the nozzles at each level according to the original requirements.
6. After the water evaporates, install the pump core, add new diffusion pump oil, and reinstall the body, connect the water pipe, install the electric stove plate, and then you can restart the machine.
7. Before restarting, pay attention to leak detection. The method is: start the maintenance pump, close the vacuum chamber door, and after a few minutes, observe whether the vacuum degree is 6*100 Pa, otherwise, leak detection is required to check whether the sealing rubber ring is missing at the connection or the sealing ring is crushed. Heating can be carried out only after eliminating the hidden danger of leakage, otherwise the diffusion pump oil will burn out and cannot enter the working state.