(1) Various functional films: such as films with absorption, transmission, reflection, refraction, polarization and other functions. For example, low-temperature deposition of silicon nitride anti-reflection film to improve the photoelectric conversion efficiency of solar cells.
(2) Applications in the decorative field, such as various total reflection films and semi-transparent films, such as mobile phone shells, mice, etc.
(3) In the field of microelectronics, as a non-thermal coating technology, it is mainly used in chemical vapor deposition (CVD) or metal organic
(4) Thin film deposition of materials that are difficult to grow and unsuitable for chemical vapor deposition (CVD), and large-area very uniform thin films can be obtained.
(5) In the field of optics: medium-frequency closed-field unbalanced magnetron sputtering technology has also been applied in optical thin films (such as anti-reflection films), low-radiation glass and transparent conductive glass. In particular, transparent conductive glass is widely used in flat-panel display devices, solar cells, microwave and radio frequency shielding devices and devices, sensors, etc.
(6) In the mechanical processing industry, the surface deposition technology of surface functional films, superhard films, and self-lubricating films has made great progress since its inception. It can effectively improve the surface hardness, composite toughness, wear resistance and high-temperature chemical stability, thereby greatly improving the service life of coating products.
