Although there are many types of ion sources, their purpose is essentially the same: online cleaning, improving the energy distribution on the plated surface, and modulating the energy of the reactant gas. Ion sources can significantly improve the bonding strength between the film and the substrate, while also improving the film's hardness and wear and corrosion resistance. For tool wear-resistant layers, which are generally thicker and do not require high uniformity in film thickness, ion sources with higher ion current and energy levels, such as Hall ion sources or anolyte ion sources, can be used.
Anodic ion sources operate on a principle similar to Hall ion sources. A strong magnetic field is applied within a narrow annular (rectangular or circular) slit, ionizing the working gas under the influence of the anode and directing it towards the workpiece. Anodic ion sources can be made very large and long, making them particularly suitable for coating large workpieces, such as architectural glass. They also offer a relatively large ion current. However, their ion current is more diffuse, and the energy level distribution is too wide. They are generally suitable for large workpieces, glass, abrasive surfaces, and decorative components. However, their application in advanced optical coatings is not widespread.
Although there are many types of ion sources, their purpose is essentially the same: online cleaning, improving the energy distribution on the plated surface, and modulating the energy of the reactant gas. Ion sources can significantly improve the bonding strength between the film and the substrate, while also improving the film's hardness and wear and corrosion resistance. For tool wear-resistant layers, which are generally thicker and do not require high uniformity in film thickness, ion sources with higher ion current and energy levels, such as Hall ion sources or anolyte ion sources, can be used.
Anodic ion sources operate on a principle similar to Hall ion sources. A strong magnetic field is applied within a narrow annular (rectangular or circular) slit, ionizing the working gas under the influence of the anode and directing it towards the workpiece. Anodic ion sources can be made very large and long, making them particularly suitable for coating large workpieces, such as architectural glass. They also offer a relatively large ion current. However, their ion current is more diffuse, and the energy level distribution is too wide. They are generally suitable for large workpieces, glass, abrasive surfaces, and decorative components. However, their application in advanced optical coatings is not widespread.
The Hall ion source in a vacuum coating machine ionizes the process gas under the assistance of a strong axial magnetic field. The strong imbalance of this axial magnetic field separates the gas ions and forms an ion beam. Due to the strength of the axial magnetic field, the Hall ion source ion beam needs additional electrons to neutralize the ion flow. A common neutralization source is a tungsten filament (cathode).
