Vacuum coating equipment often encounters unexpected situations during operation, such as water outages, power outages, and air leaks. When faced with these situations, operators may be at a loss and unsure how to handle them. Below, Puyuan Vacuum will provide a detailed emergency plan for the operation of vacuum coating equipment:
1. PVD coating equipment requires cleaning after a period of operation.
After a period of operation, typically 50 to 70 furnace cycles, the PVD coating equipment needs cleaning to remove dust from the furnace. Then, run the furnace once without a load. The procedure involves first evacuating the furnace to a vacuum level higher than 10⁻² Pa, then heating at a temperature generally 20°C higher than the normal operating temperature. Maintain this temperature at the highest possible level for at least one hour, then allow it to cool naturally. This process keeps the internal space of the vacuum coating equipment clean.
2. Replacing the Gas Cylinder
When the gas cylinder used in the vacuum coating equipment needs to be replaced, remove the pressure regulating valve and replace it with a new cylinder. Ensure there are no leaks during installation. After replacing the cylinder, before heating the workpiece, the furnace should be purged during the evacuation process to remove any air trapped in the pipeline during the cylinder replacement, keeping the purging pipeline clean.
3. Apply a small amount of lubricating oil to rotating parts.
Apply a small amount of vacuum pump oil to the rotating parts for lubrication. Ensure the vacuum pump is clean, free of iron, sand, and dust. Ensure good contact in the positioning system. The vacuum pump should rotate easily without unevenness or severe blockage.
4. Sudden Air Leak Detected During Normal Operation
If a sudden air leak is detected during normal operation, and the leak point can be located immediately, it must be sealed with vacuum sealant. Further repairs can be made after the current work is completed. If the leak cannot be located, work should be stopped immediately, and repairs should be carried out.
5. Water and Power Outages During High Temperatures
Vacuum equipment is most vulnerable to water and power outages during high temperatures. Therefore, users should ideally install a backup water tank or connect it to a tap water supply during equipment installation. If the equipment experiences a water or power outage during high temperatures, all pumps and valves should be closed. Operators should immediately connect the backup water supply or tap water to water-cool the equipment. If power cannot be restored quickly, the manual inflation valve of the inflation/deflation system should be opened to inflate the equipment for protection, with an inflation pressure of approximately -0.02 MPa. Then, turn all buttons on the control cabinet to the "off" position. Simultaneously, apply a damp towel to the electrode lead-out interface and replace it regularly to prevent overheating of the electrode interface and damage to the sealing ring.
As an engineer working with vacuum coating equipment, mastering emergency response plans is essential. Unexpected situations can arise during operation, and timely intervention is crucial to prevent unnecessary losses.
