In magnetron sputtering vacuum coating machines, the material to be coated is called the substrate, and the material being coated is called the target. Both the substrate and the target reside within the vacuum chamber. Evaporation coating typically involves heating the target to evaporate surface components in the form of atomic clusters or ions. These evaporated components then deposit onto the substrate surface, forming a thin film through a film-forming process (scattered-island structure-wandering structure-layer growth).
For sputtering coatings, it can be simply understood as using electrons or high-energy lasers to bombard the target, sputtering surface components into atomic clusters or ions, which then deposit onto the substrate surface, undergoing a film-forming process to ultimately form a thin film.
Operating Procedures: Control Cabinet Operation
1. Turn on the water pump and air supply.
2. Turn on the main power supply.
3. Turn on the power to the holding pump and vacuum gauge. Set the vacuum gauge to V1 position and wait until the value is less than 10 before proceeding to the next step. This takes approximately 5 minutes.
4. Turn on the mechanical pump for pre-evacuation. Turn on the turbomolecular pump and start it. Switch the vacuum gauge switch to V2 and evacuate until the value is less than 2. This takes approximately 20 minutes.
5. After the turbomolecular pump reading reaches 250, turn off the pre-evacuation. Turn on the forepump and high vacuum valve to continue evacuating. Only after reaching a certain vacuum level can you turn on the high vacuum gauge on the right and observe the vacuum degree. The electron gun power can only be turned on after the vacuum reaches 2 × 10⁻³.
DEF-6B Operation:
1. Main Power.
2. Simultaneously power on Electron Gun Control I and Electron Gun Control II: Press the power and delay switch for Electron Gun Control I. The delay, power, and protection lights will illuminate. After three minutes, the delay and protection lights will turn off. If the rear door is not properly closed or the water flow relay malfunctions, the protection light will remain on.
3. Power on the high voltage. The high voltage will reach over 10KV. Adjust the beam current to approximately 200mA. The screen grid is 20V/100mA, the filament current is 1.2A, and the deflection current fluctuates between 1 and 1.7A.
